The Tories have enjoyed election victory across Berkshire, ousting the Lib Dems from Newbury and holding off challenges elsewhere in the county.
Mr Benyon said he was "absolutely thrilled" with his victory
Richard Benyon won Newbury from Lib Dem David Rendel on a swing of 5.5%.
Elsewhere, the Lib Dems' decapitation campaign failed to oust shadow secretary of state for environment and transport Theresa May from Maidenhead.
John Redwood also held onto Wokingham while Andrew MacKay held onto Bracknell and Adam Afriyie held Windsor.
Mr Benyon polled 26,771 votes in Newbury - 3,460 ahead of Mr Rendel who won the seat in a by-election in 1993.
Mr Benyon said he was "absolutely thrilled" with his victory and hoped that one day his party would also oust Labour from Berkshire.
He told the BBC News website: "I want to see us win seats in Reading and to win back Slough. It's just a question of hard work."
Of his own victory, he said: "It's been a long time coming. I have worked extremely hard with a wonderful team of supporters.
"I'm looking forward to taking part in what I think will be a very interesting parliament."
In Windsor, Mr Afriyie said that the Conservatives' stance on immigration had been an important factor in the campaign, saying: "It's definitely the issue across the whole constituency and, I suppose, the whole country that people are concerned about."
Labour did, however, manage to hold onto Slough, despite Fiona Mactaggart suffering a 5.5% swing to the Conservatives.
In Maidenhead, Mrs May polled 23,312 votes, enjoying a rise of 5.8%.